Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Fine Pattern Transfer of Functional Organic Polymers by Nanoimprint
Kohei TomohiroNorihito HotoHiroaki KawataYoshihiko Hirai
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2011 年 24 巻 1 号 p. 71-75

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Nano structures on organic solar material are expected to improve power generation efficiency instead of bulk hetero junctions. In this study, we fabricated high aspect ratio nano structures using poly-3-hexylthiophene (P3HT) by a novel nano-imprint process. Fine structures 70-nm wide and 550-nm high were successful obtained. However, the pattern defects in the de-molding process were increased by basing on the increment of the pattern′s aspect ratio. We also investigated the relation between aspect ratio and defect yield.
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© 2011 The Society of Photopolymer Science and Technology (SPST)
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