2011 年 24 巻 5 号 p. 587-593
A polymer material indicates higher durability and resistance properties against to reactive gases, acid and alkaline solutions. Fluid control MEMS (micro electro mechanical systems) with micro diaphragm pumping system used for reactive gas control is constructed. A resist film made of novolac resin as a diaphragm material is employed. An Au/Si/resist multilayer structure as a diaphragm of 1mm diameter is formed by optical lithography and anisotropic wet etching techniques. A micro channel structure of 50μm width is also fabricated by employing a polymer thick film. The mechanical strength of a diaphragm is tested by applying static load using a probe system. By applying 20V bias between diaphragm and base electrodes, Coulomb attractive force acts to operate the diaphragm motion. As the fluid flow control, a silane-coupling vapor gas of HMDS (hexamethyldisilazane) is employed. A contact angle of water indicates hydrophobic of a glass substrate by HMDS vapor control using the MEMS.
