Abstract
A micro polymer capsule of 6.5mm length and 4.0mm diameter is fabricated by multi laminating method. The micro polymer capsule has 56 micro pillars for generating a turbulent liquid flow in the inside of capsule. As a fabrication process, the SU-8 resist film based on epoxy resin is coated on a glass substrate. A ring shape image is exposed on the resist film. After pattern development, the ring patterns are peeled from the glass substrate by dipping into HF aqueous solution. The SU-8 ring patterns are stacked in 18 layers by using the micro tweezers under the alignment accuracy of ±0.3mm. In order to adhere the SU-8 ring layers each other, an i-line resist material is pasted into SU-8 ring patterns, then baked on a hotplate at 200°C for 10min. These functional capsule structures can contribute to develop various biological and medical MEMS(Micro Mechanical electronic system) devices.
