Pattern Scaling of Holes, Bars, and Trenches with Directed Self-Assembly using Polymer Blend

Abstract

The directed self-assembly (DSA) of polymer blends in various types of guiding patterns was investigated. The change in CD and aspect ratio before and after the DSA process as a function of the pitch and aspect ratio of the guiding patterns are reported. The behavior of polymer blend DSA was found to depend on guiding pattern design rather than a simple conformal, spacer-like shrinking. The results achieved from this study provided useful information for guiding pattern design for this specific polymer blend system.