Plasma-Chemical Indicator and It’s Color Changes by Oxygen Plasma

抄録

The relationship between PCI color shift and W/FM was examined. And the possibility of the universal quantification for the action of O (³P or ¹D) and O₂ (¹Δ_g) in oxygen plasma was investigated using two different types of reactors, a bell-jar reactor (A-type) and a tubular reactor (B-type). There seems to exist a critical W/FM, (W/FM)c, at which neither green shift nor red shift can occur. The values of (W/FM)c for A- and B-type reactors were around 1.4 GJ/kg-O₂ and 0.6 GJ/kg-O₂, respectively. From the results of the spectroscopic approach, several peaks that attributed to atomic oxygen (¹D - ³P) and molecular oxygen (¹Σ_g+ - ³Σ_g-) were observed. The relationship between emission strength ratio of O _{(777 nm)} /O_{2 (762 nm)} and W/FM suggested that the tendencies seen in Figure 6 were characteristics peculiar to each plasma reactor, and it could be explained the reason why the red shift and green shift occured at different W/FM by different reactors. Also, this proves that PCI is available to detect the action of atomic and molecular oxygen separately.