Influence of Monomer Sequence of Binder Polymers for Lithographic Property of Photodefinable Nanocomposites

Abstract

The relationship of binder polymer compositions and lithographic properties was examined and following conclusions were obtained; (1) The alternating sequence of binder polymer is preferable to the nanocomposite of excellent transparency. (2) The moiety of methacrylic acid is necessary to be 50% or more for the residue-free patterning. (3) Photo-definable nanocomposite composed of alternating copolymer and nano titania gives a patternable nanocomposite with high refractive index.