Analyses of Morphologies in Block Copolymer Thin Films by Grazing Incidence Small Angle X-ray Scattering

Abstract

This article reviews the technique to observe the morphologies of block copolymer in thin films: grazing incidence small-angle X-ray scattering (GISAXS). In-situ measurement of GISAXS with synchrotron X-ray incident beam enables us to measure the self-assembling processes of block copolymer thin film during solvent anneal and spin cast process.