Photoresist and Thin Metal Film Removal by Steam and Water Mixed Spray

Abstract

We sprayed a mixture of steam and water on an aluminum deposited glass surface and observed the removal process. In addition, we observed ethanol droplet deformation after impact on solid surface in ethanol vapor atmosphere. As a film removal mechanism, we propose following scenario; initially high-speed droplets create spots due to high pressure during the initial stage of droplet impacts, and then lateral lamella flow, which are created by droplet impacts remove the film.