Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Visualization Plasma Diagnosis Indicator Using Discoloration Reaction of Au and Pt Ions
Kosei SatahiraSeisaku OhshiroKeiko NakamuraSeisiro ItoTatsuhiko Ihara
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2015 Volume 28 Issue 3 Pages 435-438

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Abstract
We have investigated the effects of electrons and ions on the discoloration of PCI using VI-Au and VI-Pt indicators as the probe to detect these actions visually. The actions of the electron and ion in DC plasma were distinguished by VI-Pt. The discoloration action to VI-Au by the action of the electron in rf plasma was similar to the discoloration action by a heat reaction. In addition, the effects of electrons and ions on the discoloration of PCI are slight when it is applied in the radio frequency plasma of 13.56 MHz.
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© 2015 The Society of Photopolymer Science and Technology (SPST)
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