Development of Flexible Film Mold for Nanoimprinting Process

Abstract

We developed replica film mold made of specific resin. Durability and transfer properties against transcription material of both the film mold and common PDMS were evaluated. Furthermore, to extend applications of film mold, micro-nano mixed structure was fabricated in film mold as we reported [3]. Finally, the film mold was applied to the roll-to-roll (R2R) UV nanoimprinting process, because high throughput is essential to achieve the mass production.