Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Development of Enlarged Nanoimprinting Mold by Step and Repeat Process
Yasuo Suto, Yukihiro Miyazawa, Takahide Mizawa
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Keywords: nanoimprint, film mold, step-and-repeat
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2016 Volume 29 Issue 2 Pages 179-180

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Abstract

We report enlarged nanoimprinting mold called tiling mold which are made of nickel or film. There are three types of tiling mold based on properties of stitched area. Each type of tiling mold has its own specific property and they will be used properly based on the demand.

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© 2016 The Society of Photopolymer Science and Technology (SPST)
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