抄録
During the past decade, we have examined the surface improvement of PVF, FEP, PFA, and PTFE films by APGD system. Their adhesive strength with an epoxy resin could be improved that attained by different kind gas introduction to the plasma system. Last year, new idea using NH4/H2O as the treating gas was proposed in the low pressure glow discharge (LPD) to treat PTFE by T. Yajima et al. So we examined the surface effects in both process, APGD and LPD, using NH4/H2O mixture. APGD treatment could not have any chemical effect on the PTFE surface. On the other hand, LPD, we got the proof of super hydrophilicity on the PTFE. It seemed that in the low pressure, a slow sputtering will be a preceding reaction on the PTFE even used the NH4/H2O. The difference of the kinetics was considered in the evaluation of both processes, APGD and LPD.
