Three Dimensional Assembly in Directed Self-assembly of Block Copolymers

Tamar Segal-Peretz; Chun Zhou; Jiaxing Ren; Takahiro Dazai; Leonidas E. Ocola; Ralu N. S. Divan; Paul F. Nealey

doi:10.2494/photopolymer.29.653

Tamar Segal-Peretz, Chun Zhou, Jiaxing Ren, Takahiro Dazai, Leonidas E. Ocola, Ralu N. S. Divan, Paul F. Nealey

著者情報

キーワード: Directed self-assembly, block copolymer, lithography, contact hole, transmission electron microscopy, metrology

ジャーナルフリー

2016 年 29 巻 5 号 p. 653-657

DOI https://doi.org/10.2494/photopolymer.29.653

詳細

抄録

The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Future work will include control over 3D assembly in sub-10 nm processes.

責任著者(Corresponding author)

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