Abstract
In DSA pattern observation of hp 5 nm and below, the pattern observation method for physical and chemical structures is necessary. Scattering measurement of hard X-rays is one method which can quantitatively evaluate the physical structure of materials. However, when many components such as polymer materials are mixed, it can observe the averaged physical structure, and it is difficult to evaluate the structure of the individual chemical components. Thus, we developed a scattering measurement method using soft X-rays near the carbon absorption edge. Since the absorption spectrum varies in the near carbon absorption edge for each polymer molecule, the individual physical structures can be observed from the scattering profile with different photon energy. In this study, both the physical and chemical structures of the triblock terpolymers such as poly[isoprene-block-styrene-block-(2-vinylpyridine)] which consists of polyisoprene, polystyrene, and poly(2-vinylpyridine) were observed. The physical structure of the triblock polymer observed two types of the packed cylinder structures such as the tetragonal and hexagonal packed structures. The film thickness of this triblock polymer was 400 nm. By varying the photon energy of the scattering measurement, the scattering light intensity changed greatly, and the signal from each polymer could be evaluated. The soft X-ray scattering measurement at the near absorption edge can be measured the molecular structure of a composite material such as a blended polymer individually and can be utilized in material development.
