Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Photoreactions of Tin Oxo Cages, Model EUV Photoresists
Jarich HaitjemaYu ZhangNiklas OttossonAlbert M. Brouwer
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2017 Volume 30 Issue 1 Pages 99-102

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Abstract
Organotin oxo cage compounds have an electronic absorption band in the UV spectral range (λmax ~220 nm) associated with a σd electronic transition. Irradiation at 225 nm of thin films of these materials leads to loss of carbon, as shown by X-ray Photoelectron Spectroscopy. Photolysis of solutions of the compounds causes a decrease and slight broadening of the absorption band, consistent with replacement of the organic groups. Quantum chemical calculations support the breaking of the tin-carbon bonds as the primary process, both in electronically excited states and in oxidized states that can be expected to be the result of EUV photoionization.
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© 2017 The Society of Photopolymer Science and Technology (SPST)
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