Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Novel Acid Amplifier Generating Disulfonimide as Superacid
Tomotaka Tsuchimura, Takeshi Kawabata
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Keywords: Disulfonimide, Acid amplifier, Superacid, Photoresist
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2017 Volume 30 Issue 6 Pages 645-649

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Abstract
Disulfonimide acid amplifier which produces superacid was newly designed and synthesized. This compound exhibited high acid generation efficiency and thermal stability on a polymer film. Further, this compound enhanced the sensitivity in the positive chemically amplified photoresist system.
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© 2017 The Society of Photopolymer Science and Technology (SPST)
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