Gas Permeability Characterization of a Metal Plate for Photo-imprint Lithography
2018 年 31 巻 4 号 p. 575-580
詳細
2018 年 31 巻 4 号 p. 575-580
During the nanoimprinting process, transfer failure is caused by the presence of air between mold and substrate or the gas generated from the resist material. Therefore, a gas permeable metal plate was prepared, and a plant-derived material containing 50 wt% acetone, was used as the imprinting mold. The gas permeability of the metal plate was evaluated. The results reveal that no gas pool comprising volatilized acetone was found on the surface of the mold material. Thus, the use of gas permeable metal plates can reduce the transfer defects occurring in imprint lithography.
