Durability Evaluation of Antireflection Structure Replica Mold using High Hardness and Antifouling UV-curable Resin

Abstract

Moth-eye-structure replica mold was fabricated from a glassy carbon master mold by UV-NIL. New UV curable resin with high hardness and antifouling property was used. The moth-eye-structure was duplicated from the replica mold by use conventional UV curable resin for UV-NIL. Compared with the replica mold by use of a conventional release-agent-free UV curable resin, the moth-eye-structure of new replica mold had superior imprint durability. The reflectance of the imprinted film was below 1% for the 350th imprint. It was that the antifouling property was very important for prolonging life time of replica mold.