Characteristic of Immunosorbent Assay using Micro Capillary Arrays coated by SiCOxHy CVD Films

Abstract

Micro fluidic devices utilize size effects to achieve fast and high-yield reactions with simple structures. In this study, high-aspect-ratio micro capillary arrays were fabricated using synchrotron-radiation Deep X-ray Lithography (DXL). This structure has functions such as valves, reservoirs, mixers, and immune reaction fields to provide vertical fluid control. However, fluid behavior in a micro capillary is affected by the contact angle of the material surface, so it is necessary to control the contact angle of the surface. The stability of the contact angle is also important for fluid control. Therefore, SiCOxHy films, which are formed by Penning Ionization Gauge (PIG) plasma Chemical Vapor Deposition (CVD) method and whose contact angle can be controlled by changing the deposition conditions, were coated on the reaction field to measure the stability of the contact angle and detect the reaction. When SiCOxHy films were formed on 96-well microtiter plates and Enzyme-Linked Immunosorbent Assay (ELISA) was performed, changes in absorbance on the concentration of the substance to be measured were observed at a contact angle of 63.8 degrees. Thus, the prospect of applying SiCOxHy films to micro fluidic devices for immunosorbent assays has demonstrated to be promising.