抄録
Organosilicons, in particlular tctracthoxyorthosilicate(TEOS) and hexamethyldisiloxanc(HMDSO) have been plasma-polymerized in radio frequency discharge on polyethylene terephthalate(PET) and polypropyrene(PP). Films were formed as function of plasma power, electrode distance, working pressure. For reference, PP and PET were modified by Ar or oxygen plasma. The surface properties of the treated films were analyzed by X-ray photoelectron(XPS) spectroscopy and contact angle measurements. In order to identify the excited species in the discharge, optical emission spectroscopy was carried out. It was concluded that using oragnosilicons and varying the process parameters, the surface wettability can controlled to hydrophilic or hydrophobic.