抄録
The vapor-phase reaction induced by dielectric gas breakdown using a pulsed laser has been applied to the syntheses of the fine particles of Sn, Ti and V oxides. The phase characteristics and particle size were investigated using X-ray diffraction and transmission electron microscopy. Stannic oxide with a mean particle size of 8.2nm was synthesized from a gas mixture of SnCl4+O2. Titanium oxide (anatase: rutile=80:20) with a mean particle size of 8.5nm was synthesized from a gas mixture of TiCl4+O2. Rutile TiO2 (rutile:anatase=91:9) with a mean particle size of 53nm was synthesized from a gas mixture of TiCl4+O2+H2. Either VO2 or V2O3 was formed from a gas mixture of VOCl3+O2+H2 dependeding on the mixing ratio of the raw materials.
