High Resolution Single-Component Resists Based on Terpolymers Having Photoacid-Generating Camphorsulfonyloxymaleimide Units

Journal of Photopolymer Science and Technology

Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244

High Resolution Single-Component Resists Based on Terpolymers Having Photoacid-Generating Camphorsulfonyloxymaleimide Units

Sang-Tae Kim, Jin-Baek Kim, Jong-Man Kim, Chan-Moon Chung, Kwang-Duk All

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Keywords: terpolymers, photo-acid generation, camphorsulfnyloxymaleimide

JOURNAL FREE ACCESS

1997 Volume 10 Issue 3 Pages 489-492

DOI https://doi.org/10.2494/photopolymer.10.489

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© The Technical Association of Photopolymers, Japan

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