Abstract
We have carried out the basic study for controlling the surface condition ( shape ) of the material which has the three-dimensional complex structure, by using the plasma. The plasma surface modification has been used in order to add useful functions to the surfaces of the various materials. However, it is difficult to modify the complex surface structure.
In this study, the simple samples ( models ) which represented the three-dimensional complex structures were developed and modified by O2 plasma. The plasma could reach the material even if it passed through the complex route with twists and turns, and treat the material behind the obstacle. It could change its route of the flow with the obstacle.