抄録
Novel water-soluble azide polymer (PVA-ARBB) was prepared by acetalizing poly(vinyl alcohol) (PVA, degree of polymerization(DP), 1700; 88% saponified; 1.0mol% acetalized) with the sodium salt of 5-(4-azido-2-sulfobenzylidene)-3-(4, 4′-dimethoxybutyl)rhodanine (ARBB). PVA-ARBB showed high sensitivity (E0.5=0.8mJ/cm2, d=1.0μm) under low light intensity (0.15mW/cm2, UV-35). PVA-ARBB was tested as a water-soluble photoresist in comparison with an established system of base polymer and a bis-azide compound, sodium 4, 4′-diazidostilbene-2, 2′-disulfonate (DAzSTNa) and proved itself as a superb substitute for DAzSTNa. When poly(vinylpyrrolidone) (PVP) was used as basic polymer, PVA-ARBB/PVP/DAzSTNa (10/100/10 by weight) showed higher sensitivity (E0.5=0.7 mJ/cm2, d=0.7μm) than that of PVP/DAzSTNa (100/10 by weight, E0.5=9.0mJ/cm2, d=0.7μm).
