Theoretical Estimation of Absorption Coefficients of Various Polymers at 13nm

Abstract

By using the mass absorption coefficients of Henke at 13nm and the density obtained from the graph-theoretical treatment derived by Bicerano et al., we have calculated the linear absorption coefficients at 13nm for about 150 polymers. The computational time required for a prediction is at most a few minutes, including the time to construct the input deck. The mean error of the predicted values is estimated to be 2.2%. Thus, a method of quickly surveying polymers to find those with a low absorption at 13nm has been established