Influence of the Oxygen Partial Pressure on the Photo-Curing of Photo-Oxidation Induced Polycondensation Resin

抄録

The unique properties of the photo-oxidation induced polycondensation resin (POP resin) were experimentally investigated using ¹H NMR analysis, photolithographic evaluation and photo-DSC analysis. While a conventional photo-radial polymerization (PRP) type resin showed the phenomenon of reciprocity law failure at low intensity irradiation and decreasing thickness of the developed film with increased oxygen partial pressure, oxygen was found to improve the sensitivity of the POP resin Post-exposure baking (PEB) also enhanced the curing of the POP resin. The ¹H NMR study indicated that the precursor at the crosslinking point is relatively stable at room temperature. The effectiveness of C₆₀, added to the POP resin was discussed on the basis of the photo-DSC analysis.