Abstract
C-S and C-S-Au compound were formed by RF plasma CVD with using methane, SF6 and Ar mixture gas at a pressure of 0.1Torr, a discharge frequency of 13.56MHz and a discharge power of 100Watt, and a discharge duration of 30min, but C-S-Au compound was formed using gold plate set on the upper graphite discharge electrode instead of graphite plate. At the constant gas flow rate of 10 SCCM for methane and Ar, and the varying SF6 flow rate from 2 to 25 SCCM, the refractive indexes were changed from 1.7 to 2.4 and from 2.0 to 3.7 for C-S and C-S-Au compound, respectively.
