Abstract
We have investigated the laser ablation of UV transparent materials of PTFE, FEP, quartz and sapphire with a femtosecond-pulsed UV laser at the wavelength of 268nm. Upon laser irradiation, a fine etching without debris was obtained on the surfaces of PTFE and quartz. The laser-ablated surfaces were analyzed by optical microscopy. The ablation mechanism is discussed in terms of multi-photon absorption and thermal diffusion induced by a ultra-short pulse of the laser.
