Abstract
The adhesion of the PTFE substrate whose surface was modified by photochemical reaction upon the irradiation of an ArF excimer laser and Xe2* excimer lamp under a hydrazine and ammonia atmosphere was examined by a peel-off test for the sample prepared by jointing the PTFE substrate and a copper plate through chemical adhesives. These surface-modified PTFE samples were improved in adhesive property, which was 7-20 times higher than that of original PTFE. The chemical modification on the surface of PTFE was discussed on the basis of XPS and static SIMS analyses.