Refractive Index and Transmittance Optimization of C-S-Au Film by Plasma Process

Abstract

Carbon-sulfur-gold (C-S-Au) film was formed by co-operation process of plasma CVD and sputtering with using methane, SF₆ and Ar mixture gas and gold plate discharge electrode. After optimization, 51% of transmittance at around 500nm and 3.5 of refractive index was realized at a gas flow rate of 10, 10 and 15 SCCM for methane, SF₆ and Ar respectively, a pressure of 0.1Torr and a discharge power of 100W. The large refractive index was referred to atomically distributed gold atom in the C-S-Au film.