TERPOLYMERS OF TOSYLOXYMALEIMIDE FOR APPLICATION AS A POLYMERIC PHOTOACID GENERATOR IN SINGLE-COMPONENT RESISTS

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Terpolymers of sulfonyloxymaleimides have been prepared as a new class of polymeric photoacid generator and their photochemical and thermal properties were investigated. The styrenic copolymers of N-tosyloxymaleimide (TsOMI) produced p-toluenesulfonic acid (TsOH) in solid state by deep UV irradiation and the amount of generated acid was determined by using a colorimetric method. Two terpolymers of TsOMI and p-(t-butyloxycarbonyloxy)styrene showed the capability of a single-component, chemically amplified resist system in deep UV region. Positive- and negative-tone images were obtained with sensitivity of 50mJ/cm².