Abstract
Glassy carbon(GC) was treated by radio frequency(13.56 MHz) glow discharge plasma with heating it in order to investigate the heating effects. Source gases were CF4, O2 and Ar. Treatment time and heating temperature of the GC plate were 30 minutes and 200-500°C, respectively. The surface property before and after the plasma treatment was estimated by the contact angle of water to GC surface, its elapsed change and ESCA spectra of GC surface. In the surface modification by plasma, the contact angle changes with time after the plasma treatment, that make it difficult to use. Against this, in case of CF4 plasma or O2 plasma, the contact angle after the plasma treatment was constant even if time passed when GC was treated by these plasma with heating it. The elapsed change was reduced completely because the bounding property of both fluorine atoms and oxygen atoms was controlled by heating in the plasma treatment. On the other hand, the elapsed change was not reduced completely by heating with Ar plasma. It is considered that the oxygen atoms are introduced onto the GC surface after the plasma treatment when it takes out of the treatment chamber to air: the bonding property of them can not be controlled by heating in treating it by plasmas.
