Abstract
Plasma polymerization of tetraethoxysilane or perfluoro-n-hexane /hydrogen was investigated in order to reduce the pore size of NaA and ZSM-5 zeolite membranes and improve the gas selectivity through the membrane. Plasma polymerization was carried out in a bell-jar type of reactor with an inductive coupled rf (13.56MHz) power source. The effect of plasma condition on the deposition rate of plasma polymer was examined and the structure of plasma polymers was characterized by IR. The gas permeation through zeolite membranes modified by plasma polymerization was also investigated. Modified ZSM-5 zeolite membrane shows an improvement of the selectivity of gases by the reduction of the size of defect pore of the membrane.
