Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : K33
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Host: The Japan Society of Precision Engineering

Performance Improvement of Optical Stylus Instrument with Speckle Noise Removal Function
*Hiroya Fukatsu, Kazuhisa Yanagi, Kiyotaka Misu
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Keywords: Optical Stylus Instrument, Focus Error Detecting System, Speckle Noise
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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