Preparation of Diamond-Like Carbon Films by Magnetron CVD using Nano-pulse Generator

Abstract

Diamond-like carbon (DLC) has many good property as a high wear-resistant, low friction coefficient, a high mechanical hardness, gas barrier, chemical inertness. And now DLC films have very various applications as protective coatings in areas, such as magnetic strage disks, dies and plastic bottles. This research aims high speed deposition and selective deposition of DLC films by magnetron CVD method. Magnetron CVD is plasma enhanced CVD with magnetic field around substrate. Deposition rate of DLC films by magnetron plasma CVD method is more than fifty-fold larger than that of plasma CVD method. The magnetic field aroud the substrate was analyzed.