Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : J02
Conference information

Host: The Japan Society of Precision Engineering

Development of Seal-like Precise Positioning Mechanism by Using Difference of Friction Force (8th Report)-Application to AFM stage
*Katsumi Kawagoe, Katsushi Furutani, Yoshitaka Mieda
Author information
Keywords: Piezoelectric Element, Mobile Device, Friction Force, Atomic Force Microscope
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (162K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2004 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top