Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : J03
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Host: The Japan Society of Precision Engineering

Development of Ultraprecision Alignment Table Driven by Means of Walking Drive
Eiji Shamoto, *Yuuki Yamamoto, Yoshiteru Taniguchi, Masahiro Kato, Kiyoshige Nunome, Akira Yamauchi, Satoru Naraba
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Keywords: Walking Drive, Positioning, Piezoelectric Actuator, Image Processing, Alignment
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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