Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : J04
Conference information

Host: The Japan Society of Precision Engineering

Operation of Telescopic Stick-Slip Actuator in High Vacuum
*[in Japanese], [in Japanese]
Author information
Keywords: piezoelectric element, precision positioning, variable length, ultra high vacuum, nonmagnetic
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (237K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2004 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top