Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : J06
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Host: The Japan Society of Precision Engineering

Development of Ultra-High Vacuum Compatible Rotary Feedthrough Using Ultrasonic Motor -Improvement of driving performance with metal rotor in ultra-high vacuum condition-
*Yasuhiro Endo, Toshiki Niino
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Keywords: ultra-high vacuum, ultrasonic motor, rotary feedthrough
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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