Wavelength Trimming of Micro-Machined VCSELs

Hayato SANO; Norihiko NAKATA; Akihiro MATSUTANI; Fumio KOYAMA

doi:10.1587/transele.E95.C.237

Special Section on Photonic Devices using Nanofabrication Technology and Their Applications

Wavelength Trimming of Micro-Machined VCSELs

Hayato SANO, Norihiko NAKATA, Akihiro MATSUTANI, Fumio KOYAMA

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Keywords: VCSEL, MEMS, wavelength trimming, WDM, optical Interconnects

JOURNAL RESTRICTED ACCESS

2012 Volume E95.C Issue 2 Pages 237-242

DOI https://doi.org/10.1587/transele.E95.C.237

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Abstract

We demonstrate the wavelength trimming of MEMS VCSELs by etching a cantilever-shaped top mirror using FIB etching. The proposed technique can be used for the post-process precise wavelength allocation of athermal MEMS VCSELs. The modeling and experimental results on 850nm MEMS VCSELs are presented. The results show a possibility of realizing both red-shift and blue-shift wavelength changes by choosing the etching area of the cantilever.

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