Micro-Stereolithography of Dot Shapes for Lightguide using LCD Grayscale Mask

Abstract

In this study, a novel microfabrication method that is micro–stereolithography using a LCD grayscale mask has been proposed. Light transmittance distribution with the LCD grayscale mask can be varied with that level of grayscale. Accordingly, a grayscale pattern of the LCD mask is responsible for an intensity distribution of an exposure pattern. This method has realized a fabrication of the prismatic shaped dot with the size of 18µm in width and 15µm in height. Consequently, the feasibility of the microfabrication was experimentally confirmed for the lightguide with high light guiding efficiency used in LCD backlight unit.