High Flatness Grinding of Rectangle Glass Materials(3rd Report)

Abstract

High flatness and smoothness is required to a rectangular mask for various displays. This mask plate must be worked center– symmetrically for the next polishing process. This paper describes grinding profiles for circular and rectangular glasses and the optimum condition was discussed to grind center–symmetrically. The uniform circumferential profile was achieved under the grinding condition of the low infeed rate right after dressing.