Proceedings of JSPE Semestrial Meeting
2005 JSPE Autumn Meeting
Session ID : F13
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Host: The Japan Society for Precision Engineering

Fabrication and evaluation of non-axis symmetric aspheric surface by fast piezoelectric stage
*Yutaka Yamagata, Hirofumi Suzuki, Toshiro Higuchi, Katsuhiko Iida, Kazushi Yoshida, Kiyotoshi Makino, Hitoshi Ohmori
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Keywords: non–axis symmetric aspheric surface, fast tool servo, ultrahigh precision machining
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[in Japanese]
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© 2005 The Japan Society for Precision Engineering
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