Proceedings of JSPE Semestrial Meeting
2005 JSPE Autumn Meeting
Session ID : F14
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Host: The Japan Society for Precision Engineering

Evaluation of ultrahigh precision machine tool driven by linear motor
*Yutaka Yamagata, Hirofumi Suzuki, Toshiro Higuchi, Kazushi Yoshida, Kiyotoshi Makino, Hitoshi Ohmori
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Keywords: ultrahigh precision machine tool, linear motor
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[in Japanese]
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© 2005 The Japan Society for Precision Engineering
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