Abstract
Indenter geometry is obtained as numerical data of 3D images with some kind of instruments, such as scanning white light interferometry, AFM, etc. In order to analyze geometric parameters, i. e., angles between opposite faces, angles of square perpendicular to the indenter axis, length of line of conjunction, etc. in good accuracy, the procedure based on a model expressed with regression planes of indenter surfaces was developed. The advantage of proposed method was examined by comparing with the conventional method, which measures the geometry of cross sections of 3D images.