Abstract
″Non abrasive ultrasonic vibration polishing″ as a new method of polishing CVD diamond films had been proposed and it was clarified that the titanium is the best tool material for polishing and thin oil film applied on working surface accelerates polishing speed by preventing adhesion of titanium to diamond. Therefore in order to apply this method to practical use, surface polishing was attempted. As a result, it is obtained that smooth surface is realized by crossing the first tool feed direction and the second direction, and Smoother surface is realized by moving tool in the same direction than the vertical direction to the vibration direction.
