Abstract
As a new ultra–precision and ultra–clean processing method, we developed a machining method in ultrapure water. In this method, OH radicals produced from OH– ions in ultrapure water are predicted to take a major role. So we measured OH radicals produced at anode electrode surface using a reagent that reacts selectively with OH radicals. And it was found that OH radicals were produced at the anode electrode in the course of electrolysis of ultrapure water. By simple arithmetic, 0.35% of OH radicals produced were detected but major parts were supposed to be used to produce oxygen.