2005 JSPE Autumn Meeting
Session ID : G24
Conference information
Host: The Japan Society for Precision Engineering
Development of Cleaning Method Using High-Speed Shear Flow of Ultrapure Water
Kenichi Morita, *Koji Sawai, Hidekazu Goto, Kazuto Yamauchi, Katsuyoshi Endo, Yuzo Mori
Author information
Keywords:
organic contaminants,
cleaning,
Si substrate,
ultrapure water,
high–speed shear flow,
FTIR ATR
Details
