Development of Bio-Microdevice Actuated by Piezoelectric Thin Film for Enhancement of Cell Functions

Abstract

In order to enhance cell functions such as cell multiplication and gene transfer by applying mechanical stimulation to cells, we have been developing a bio–microdevice actuated by piezoelectric PZT thin film. First, we optimized the design of the device by a finite element method (FEM). The deflection of the diaphragm with a size of 100 μm × 100 μm was estimated to be about 100 nm when a voltage of 10 V was applied to a PZT film actuator. Moreover, we fabricated PZT thin film by a sol–gel method and characterized its crystallographic structure. When pyrolysis at 320°C for 1 min and then annealed at 600°C for 1 min in air, PZT thin films with (111) orientation were obtained.