Abstract
Scratch tests on diamond-like carbon (DLC) coatings deposited by focused ion beam chemical vapor deposition (FIB-CVD) process on Si, Ni, WC substrate were carried out using a nano-scratch tester. Tested specimens were observed by SEM and AFM to determine critical loads. The results showed the DLC films on WC, Ni substrate were delaminated by 18 and 6 mN loadings, respectively. On the other hand, no delamination was observed on the DLC film on Si substrate. From the critical loads and observations, it was shown that bonding of the DLC on the substrate was the strongest on Si, and the WC substrate showed higher properties than Ni one.
